Strain investigation of InGaAs/GaAs multiple quantum wells by reciprocal space mapping
Abstract
The goal is to provide a less destructive and less labor intensive alternative to Transmission Electron Microscopy (TEM) in investigating strained materials. To do this we use an x-ray diffraction technique known as reciprocal space mapping. We demonstrate this using three epitaxially grown InGaAs/GaAs multiple quantum wells (MQW) with different composition fractions x. The reciprocal space maps (RSM) show that the sample with the highest x experiences the smallest strain and is 20.8% relaxed. The rest of the samples demonstrate the case of fully-strained lattices.