Pressure dependence of current-voltage characteristics of a magnetically confined heaterless hollow cathode

Authors

Arantxa Danielle Montallana ⋅ PH Balik Scientist Program, Department of Science and Technology

Abstract

A hollow cathode is a type of cathode used in gas discharge systems that enhances plasma generation due to its unique geometry which is either cylindrical or cup-shaped cavity. Due to the hollow cathode effect, dense and stable plasma is produced compared to traditional cathodes. However, conventional hollow cathodes rely on resistive heaters to initiate electron emission, presenting challenges such as extended heating times, additional power supply requirements, and limited operational lifetimes due to thermal fatigue. To address these limitations, heaterless hollow cathodes (HHCs) have emerged as a promising alternative. HHCs utilize high voltage breakdown and self-heating from the discharge current to achieve ignition, offering benefits such as reduced power demand, faster start-up, and improved longevity. This work presents the characterization of a custom-designed titanium (Ti) HHC with a 0.7 mm aperture, intended for use as a sputter source in Ti thin film formation. The discharge characteristics were evaluated in argon (Ar) across a pressure range of 10–100 Pa, with and without the application of an external magnetic field. Stable discharge operation and high voltage breakdown resistance were achieved, demonstrating the viability for sustained operation. Results show that the magnetic field enhances discharge stability and potentially improves the sputtering efficiency, making the compact Ti HHC a suitable candidate for thin film deposition systems. HHC-driven sputtering is particularly useful for depositing uniform, high-quality coatings that can be operated at lower pressures and voltages, improving efficiency and film properties.

About the Speaker

Arantxa Danielle Montallana, Balik Scientist Program, Department of Science and Technology

Dr. Dane Montallana is a Balik Scientist under the Department of Science and Technology -- Philippine Council for Industry, Energy, and Emerging Technology Research and Development (DOST--PCIEERD), contributing to the development of plasma science and technology in the Philippines. She earned her Ph.D. in Electrical Engineering from Doshisha University, Japan, and holds both her Master's and Bachelor's degrees in Engineering from the University of the Philippines Diliman. Her research interests spans vacuum technology, plasma-material interactions, and semiconductor photocatalysts, with a particular interest in the use of plasma for environmental applications and materials processing. Dr. Montallana has conducted collaborative research work with institutions such as the University of California, Berkeley, National Taiwan University of Science and Technology, and Kogakuin University, where she worked on projects involving photocatalytic materials and plasma-assisted processes.
In addition to her academic work, she is a co-founder of Dinagipik Innovations Inc., a Philippine start-up focused on providing plasma-based solutions for local industries. As a Balik Scientist, Dr.~Montallana continues to support local research initiatives and build collaborations that integrate international research expertise with local challenges.

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Issue

2025: Proceedings of the 43rd Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2025-INV-2D-01

Section

Invited Presentations

Published

2025-06-26

How to Cite

[1]

AD Montallana, Pressure dependence of current-voltage characteristics of a magnetically confined heaterless hollow cathode, Proceedings of the Samahang Pisika ng Pilipinas 43, SPP-2025-INV-2D-01 (2025). URL: https://proceedings.spp-online.org/article/view/SPP-2025-INV-2D-01.