Gas leak detection using DC glow discharge

Abstract

Direct current (DC) glow discharge system was used to demonstrate its capability for gas leak detection in vacuum systems using neon and air. The optical emission spectra from neon-air and air-only glow discharge were compared with neon acting as a leak. The emission spectra show the presence of neon which shows its capability as a detection method. To determine the source of the leak inside the vacuum chamber, the intensity of specific spectral lines of neon and atmospheric air was used to generate intensity maps. The highest intensity for neon is observed to be localized at the point nearest to the gas inlet for neon. On the other hand, atmospheric air cannot be localized due to probe limitations and inherent leak effects.