Characterization of 13.56 MHz RF atmospheric pressure plasma sources for ion mobility spectrometry

Authors

  • Keith Nealson M. Penado ⋅ JP Graduate School of Science and Engineering, Doshisha University, Japan
  • Allen Vincent B. Catapang ⋅ JP Graduate School of Science and Engineering, Doshisha University, Japan
  • Motoi Wada ⋅ JP Graduate School of Science and Engineering, Doshisha University, Japan

Abstract

A 13.56 MHz atmospheric pressure capacitively coupled plasma (CCP) source, and an inductively coupled plasma (ICP) source has been developed for potential applications to ion mobility spectrometry. Utilizing double probe measurements, the electron temperatures (Te) and ion densities (ni) of the sources were obtained. These parameters were obtained over a range of input powers, flow rates, and probe distances. Typical plasma parameters of the devices at 40 W input power, and 5 L/min flow rates are Te = 0.61 eV, ni = 2.0 x 1021 m3 for the CCP source, and Te = 0.64 eV, ni = 1.3 x 1021 m−3 for the ICP source. When coupled to the IMS device at these parameters, the CCP source reports a DC signal even at low electric fields when a shutter bias is applied. This could be attributed to the significant density of ions observed at a distance larger than the distance of the plasma source to the shutter which were clarified with spatially resolved probe measurements.

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Issue

Article ID

SPP-2023-PC-16

Section

Poster Session C (Mathematical Physics, Optics, and Interdisciplinary Topics)

Published

2023-06-24

How to Cite

[1]
KNM Penado, AVB Catapang, and M Wada, Characterization of 13.56 MHz RF atmospheric pressure plasma sources for ion mobility spectrometry, Proceedings of the Samahang Pisika ng Pilipinas 41, SPP-2023-PC-16 (2023). URL: https://proceedings.spp-online.org/article/view/SPP-2023-PC-16.