DC magnetron sputtering device of Ta thin film on glass

Authors

Fluer Kim A. Caipang Department of Physics, Central Mindanao University
Bernadette D. Bermeo Department of Physics, Central Mindanao University
Melchora Mae B. Gingone Department of Physics, Central Mindanao University
Mark Nickole H. Tabafa Department of Physics, Central Mindanao University
Jay C. Galos Department of Physics, Central Mindanao University
Michelle Marie S. Villamayor Department of Physics, Central Mindanao University

Abstract

Tantalum (Ta) is known for its photoconductivity, anti-corrosion and heat-resistant properties. It is used as a coating to other metals for various applications. In this study, Ta thin films were successfully deposited on glass using a DC magnetron sputtering device with varying deposition time (3 and 9 minutes) and then subjected to contact angle measurement. The average contact angle of the two Ta-deposited samples were higher than the uncoated glass. The contact angles showed that Ta thin films were hydrophilic but has larger contact angles compared to undeposited glass.

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Issue

2023: Proceedings of the 41st Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2023-PC-15

Section

Poster Session C (Mathematical Physics, Optics, and Interdisciplinary Topics)

Published

2023-07-05

How to Cite

[1]

FKA Caipang, BD Bermeo, MMB Gingone, MNH Tabafa, JC Galos, and MMS Villamayor, DC magnetron sputtering device of Ta thin film on glass, Proceedings of the Samahang Pisika ng Pilipinas 41, SPP-2023-PC-15 (2023). URL: https://proceedings.spp-online.org/article/view/SPP-2023-PC-15.