DC magnetron sputtering device of Ta thin film on glass

Abstract

Tantalum (Ta) is known for its photoconductivity, anti-corrosion and heat-resistant properties. It is used as a coating to other metals for various applications. In this study, Ta thin films were successfully deposited on glass using a DC magnetron sputtering device with varying deposition time (3 and 9 minutes) and then subjected to contact angle measurement. The average contact angle of the two Ta-deposited samples were higher than the uncoated glass. The contact angles showed that Ta thin films were hydrophilic but has larger contact angles compared to undeposited glass.