Material parameter calculation of semiconductor substrates via terahertz time-domain spectroscopy

Authors

Zsara Mari Bianca V. Campano National Institute of Physics, University of the Philippines Diliman
Ivan Cedrick M. Verona National Institute of Physics, University of the Philippines Diliman
Lourdes Nicole F. Dela Rosa National Institute of Physics, University of the Philippines Diliman
Vince Paul P. Juguilon National Institute of Physics, University of the Philippines Diliman
Jairrus Publico Materials Science and Engineering Program, University of the Philippines Diliman
John Paul R. Ferollino Materials Science and Engineering Program, University of the Philippines Diliman
Neil Irvin F. Cabello National Institute of Physics, University of the Philippines Diliman
Alexander E. De Los Reyes National Institute of Physics, University of the Philippines Diliman
Hannah R. Bardolaza National Institute of Physics, University of the Philippines Diliman
Elmer S. Estacio National Institute of Physics, University of the Philippines Diliman

Abstract

In this study, terahertz time-domain spectroscopy (THz-TDS) was utilized to determine the refractive indices, n, and absorption coefficients, α, of semi-insulating gallium arsenide (SI-GaAs) and lightly doped n-type silicon (n-Si). Amplitude and phase information from the spectra of the transmitted THz signal were used to calculate for the material optical parameters. The obtained experimental value of refractive indices of SI-GaAs and n-Si at 1.25 THz were calculated to be 3.57 and 3.35, respectively. Meanwhile, the respective absorption coefficients of SI-GaAs and n-Si at 1.25 THz were also calculated to be 3.55 cm⁻¹ and 7.79 cm⁻¹. The experimental values of the samples' refractive indices and absorption coefficients are in close agreement with published reference values.

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Issue

2023: Proceedings of the 41st Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2023-PA-24

Section

Poster Session A (Materials Science, Instrumentation, and Photonics)

Published

2023-07-11

How to Cite

[1]

ZMBV Campano, ICM Verona, LNF Dela Rosa, VPP Juguilon, J Publico, JPR Ferollino, NIF Cabello, AE De Los Reyes, HR Bardolaza, and ES Estacio, Material parameter calculation of semiconductor substrates via terahertz time-domain spectroscopy, Proceedings of the Samahang Pisika ng Pilipinas 41, SPP-2023-PA-24 (2023). URL: https://proceedings.spp-online.org/article/view/SPP-2023-PA-24.