Finite element analysis of air-coupled dual electrode bimorph piezoelectric micromachined ultrasonic transducers

Authors

Jenny Lynn O. Almerol ⋅ PH Department of Physics, University of San Carlos
Dee Gyra Catacutan ⋅ PH Department of Physics, Univerity of San Carlos
Rey Mikefel Ofqueria ⋅ PH Department of Physics, Univerity of San Carlos
Roland Emerito S. Otadoy ⋅ PH Department of Physics, Univerity of San Carlos
Arnel A. Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

This paper presents the three-dimensional finite element analysis of an air-coupled dual electrode bimorph (DEB) piezoelectric micromachined ultrasonic transducer (pMUT). In this study, we aim to create a pMUT geometry design that can be used for rangefinding and motion sensing, i.e., the fundamental resonant frequency must range from 40 kHz to 800 kHz. Using COMSOL Multiphysics, the resonant frequency of the DEB pMUT is determined. Our results show that our selected geometry design produces fundamental resonant frequencies that are within the desired frequency range. Furthermore, we demonstrated here the effects of changing the diaphragm radius and the thickness of the active piezoelectric layer. We also presented in this paper the center displacement and the acoustic performance of the DEB pMUT.

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Issue

2023: Proceedings of the 41st Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2023-PA-10

Section

Poster Session A (Materials Science, Instrumentation, and Photonics)

Published

2023-07-03

How to Cite

[1]

JLO Almerol, DG Catacutan, RM Ofqueria, RES Otadoy, and AA Salvador, Finite element analysis of air-coupled dual electrode bimorph piezoelectric micromachined ultrasonic transducers, Proceedings of the Samahang Pisika ng Pilipinas 41, SPP-2023-PA-10 (2023). URL: https://proceedings.spp-online.org/article/view/SPP-2023-PA-10.