Plasma technology: From research to industry

Authors

Michelle Marie Villamayor Department of Physics, Central Mindanao University

Abstract

We would like to present the use of plasma sources for thin film deposition and surface modification applications.
We will present a recent result using four varieties of local Philippine rice using atmospheric pressure plasma jet (APPJ). Techniques on how to deposit various oxides (TiO₂, ZnO, V₂O₅), nitrides (TiN), 2D layered sulfides (WS₂, MoS₂) using high vacuum plasma via magnetron sputtering from various laboratories shall be introduced. A new, low-cost arc sputter and magnetron sputter currently operating at Central Mindanao University (CMU) was able to deposit Cu on poly(methyl)metacrylate (PMMA or acrylic) and V, Ta, and Nb single layers on glass. Lastly, an industry-type roll-to-roll sputter application for optoelectronic windows will be discussed.

About the Speaker

Michelle Marie Villamayor, Department of Physics, Central Mindanao University

Michelle Marie Villamayor is a proud graduate of the University of the Philippines. She finished her BS, MS and PhD Physics degrees at the National Institute of Physics. She was an exchange student researcher at Doshisha University, Kyoto, Japan. Her postdoctoral experience started in Link\"oping University in Sweden, followed by a stint at the Center for National Scientific Research in Grenoble, France. Her third postdoc was conducted back in Sweden at Uppsala University before working as a production engineer for Chromogenics AB, a smart-glass manufacturer. To date, she is affiliated as a full-time Associate Professor in Central Mindanao University and a part-time lecturer for De La Salle University.

Downloads

Issue

2023: Proceedings of the 41st Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2023-INV-3A-02

Section

Invited Presentations

Published

2023-06-10

How to Cite

[1]

MM Villamayor, Plasma technology: From research to industry, Proceedings of the Samahang Pisika ng Pilipinas 41, SPP-2023-INV-3A-02 (2023). URL: https://proceedings.spp-online.org/article/view/SPP-2023-INV-3A-02.