Plasma technology: From research to industry
We would like to present the use of plasma sources for thin film deposition and surface modification applications.
We will present a recent result using four varieties of local Philippine rice using atmospheric pressure plasma jet (APPJ). Techniques on how to deposit various oxides (TiO2, ZnO, V2O5), nitrides (TiN), 2D layered sulfides (WS2, MoS2) using high vacuum plasma via magnetron sputtering from various laboratories shall be introduced. A new, low-cost arc sputter and magnetron sputter currently operating at Central Mindanao University (CMU) was able to deposit Cu on poly(methyl)metacrylate (PMMA or acrylic) and V, Ta, and Nb single layers on glass. Lastly, an industry-type roll-to-roll sputter application for optoelectronic windows will be discussed.