Investigating effects of varying parameters on eclipsed PLD through DSMC simulations using SPARTA
Abstract
We investigate the eclipse method of pulsed laser deposition and the effects of different mask dimensions, background gas pressures, and target-to-mask distances on the film thickness distribution of a deposited film. The plasma plume is simulated by DSMC method using the open-source program SPARTA. Thickness distribution plots confirmed the decrease in deposition rate upon the introduction of a plane mask. The optimal eclipsed PLD parameters used in the simulations were specified and discussed, and recommendations were given for future studies on this topic.
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