Investigating effects of varying parameters on eclipsed PLD through DSMC simulations using SPARTA

Authors

Vincent A. Cabalar ⋅ PH National Institute of Physics, University of the Philippines Diliman
Rommil B. Emperado ⋅ PH National Institute of Physics, University of the Philippines Diliman
Lean L. Dasallas ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Wilson O. Garcia ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

We investigate the eclipse method of pulsed laser deposition and the effects of different mask dimensions, background gas pressures, and target-to-mask distances on the film thickness distribution of a deposited film. The plasma plume is simulated by DSMC method using the open-source program SPARTA. Thickness distribution plots confirmed the decrease in deposition rate upon the introduction of a plane mask. The optimal eclipsed PLD parameters used in the simulations were specified and discussed, and recommendations were given for future studies on this topic.

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Issue

2023: Proceedings of the 41st Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2023-3F-07

Section

Condensed Matter Physics and Materials Science

Published

2023-07-13

How to Cite

[1]

VA Cabalar, RB Emperado, LL Dasallas, and WO Garcia, Investigating effects of varying parameters on eclipsed PLD through DSMC simulations using SPARTA, Proceedings of the Samahang Pisika ng Pilipinas 41, SPP-2023-3F-07 (2023). URL: https://proceedings.spp-online.org/article/view/SPP-2023-3F-07.