Femtosecond pulsed laser deposition of highly oriented cerium (IV) oxide thin films with background oxygen gas

Authors

Joseph A. De Mesa ⋅ PH National Institute of Physics, University of the Philippines Diliman
Melvin John F. Empizo ⋅ JP Institute of Laser Engineering, Osaka University
Keito Shinohara ⋅ JP Institute of Laser Engineering, Osaka University
Angelo P. Rillera ⋅ PH National Institute of Physics, University of the Philippines Diliman
Vallerie Ann I. Samson ⋅ PH Philippine Nuclear Research Institute, Department of Science and Technology
Nobuhiko Sarukura ⋅ JP Institute of Laser Engineering, Osaka University
Roland V. Sarmago ⋅ PH National Institute of Physics, University of the Philippines Diliman
Wilson O. Garcia ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

We report the femtosecond pulsed laser deposition (fs-PLD) of highly oriented cerium (IV) oxide (CeO₂) thin films with background oxygen (O₂) gas. The CeO₂ films are deposited on Si(100) substrates at different O₂ gas pressures of 30 to 90 mTorr and then annealed at 1000°C in ambient air. All films exhibit CeO₂ reflections along with few cerium (III) oxide (Ce₂O₃) reflections. These Ce₂O₃ reflections are attributed to the post-deposition heat treatment due to their presence regardless of the O₂ gas pressure. Moreover, although the films have lattice constants similar to that of the CeO₂ target, a high O₂ gas pressure results in smaller mean crystallite sizes and a different preferential orientation. Our findings suggest that using a lower background O₂ gas pressure is sufficient for the fs-PLD of highly oriented CeO₂ thin films.

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Issue

2022: Proceedings of the 40th Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2022-PA-14

Section

Poster Session A (Materials Science, Instrumentation, and Photonics)

Published

2022-10-03

How to Cite

[1]

JA De Mesa, MJF Empizo, K Shinohara, AP Rillera, VAI Samson, N Sarukura, RV Sarmago, and WO Garcia, Femtosecond pulsed laser deposition of highly oriented cerium (IV) oxide thin films with background oxygen gas, Proceedings of the Samahang Pisika ng Pilipinas 40, SPP-2022-PA-14 (2022). URL: https://proceedings.spp-online.org/article/view/SPP-2022-PA-14.