Femtosecond pulsed laser deposition of highly oriented cerium (IV) oxide thin films with background oxygen gas

Authors

Joseph A. De Mesa National Institute of Physics, University of the Philippines Diliman
Melvin John F. Empizo Institute of Laser Engineering, Osaka University
Keito Shinohara Institute of Laser Engineering, Osaka University
Angelo P. Rillera National Institute of Physics, University of the Philippines Diliman
Vallerie Ann I. Samson Philippine Nuclear Research Institute, Department of Science and Technology
Nobuhiko Sarukura Institute of Laser Engineering, Osaka University
Roland V. Sarmago National Institute of Physics, University of the Philippines Diliman
Wilson O. Garcia National Institute of Physics, University of the Philippines Diliman

Abstract

We report the femtosecond pulsed laser deposition (fs-PLD) of highly oriented cerium (IV) oxide (CeO₂) thin films with background oxygen (O₂) gas. The CeO₂ films are deposited on Si(100) substrates at different O₂ gas pressures of 30 to 90 mTorr and then annealed at 1000°C in ambient air. All films exhibit CeO₂ reflections along with few cerium (III) oxide (Ce₂O₃) reflections. These Ce₂O₃ reflections are attributed to the post-deposition heat treatment due to their presence regardless of the O₂ gas pressure. Moreover, although the films have lattice constants similar to that of the CeO₂ target, a high O₂ gas pressure results in smaller mean crystallite sizes and a different preferential orientation. Our findings suggest that using a lower background O₂ gas pressure is sufficient for the fs-PLD of highly oriented CeO₂ thin films.

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Issue

2022: Proceedings of the 40th Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2022-PA-14

Section

Poster Session A (Materials Science, Instrumentation, and Photonics)

Published

2022-10-03

How to Cite

[1]

JA De Mesa, MJF Empizo, K Shinohara, AP Rillera, VAI Samson, N Sarukura, RV Sarmago, and WO Garcia, Femtosecond pulsed laser deposition of highly oriented cerium (IV) oxide thin films with background oxygen gas, Proceedings of the Samahang Pisika ng Pilipinas 40, SPP-2022-PA-14 (2022). URL: https://proceedings.spp-online.org/article/view/SPP-2022-PA-14.