Femtosecond pulsed laser deposition of highly oriented cerium (IV) oxide thin films with background oxygen gas

Authors

  • Joseph A. De Mesa National Institute of Physics, University of the Philippines Diliman
  • Melvin John F. Empizo Institute of Laser Engineering, Osaka University
  • Keito Shinohara Institute of Laser Engineering, Osaka University
  • Angelo P. Rillera National Institute of Physics, University of the Philippines Diliman
  • Vallerie Ann I. Samson Philippine Nuclear Research Institute, Department of Science and Technology
  • Nobuhiko Sarukura Institute of Laser Engineering, Osaka University
  • Roland V. Sarmago National Institute of Physics, University of the Philippines Diliman
  • Wilson O. Garcia National Institute of Physics, University of the Philippines Diliman

Abstract

We report the femtosecond pulsed laser deposition (fs-PLD) of highly oriented cerium (IV) oxide (CeO2) thin films with background oxygen (O2) gas. The CeO2 films are deposited on Si(100) substrates at different O2 gas pressures of 30 to 90 mTorr and then annealed at 1000°C in ambient air. All films exhibit CeO2 reflections along with few cerium (III) oxide (Ce2O3) reflections. These Ce2O3 reflections are attributed to the post-deposition heat treatment due to their presence regardless of the O2 gas pressure. Moreover, although the films have lattice constants similar to that of the CeO2 target, a high O2 gas pressure results in smaller mean crystallite sizes and a different preferential orientation. Our findings suggest that using a lower background O2 gas pressure is sufficient for the fs-PLD of highly oriented CeO2 thin films.

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Published

2022-10-03

Issue

2022: Proceedings of the 40th Samahang Pisika ng Pilipinas Physics Conference

Section

Poster Session A (Materials Science, Instrumentation, and Photonics)

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How to Cite

[1]
“Femtosecond pulsed laser deposition of highly oriented cerium (IV) oxide thin films with background oxygen gas”, Proc. SPP, vol. 40, no. 1, p. SPP-2022-PA-14, Oct. 2022, Accessed: Mar. 26, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2022-PA-14