Comparison of single focus and dual foci scanning in single-photon photopolymerization

Authors

Eric Joshua Vincent Capuloy Reyes ⋅ PH National Institute of Physics, University of the Philippines Diliman
Wynn Dunn Gil Dugang Improso ⋅ PH National Institute of Physics, University of the Philippines Diliman
Giovanni Alarkon Tapang ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

The photopolymerization of a single focus, and a dual focal scanner setup were simulated in order to compare their performance in a photolithography line scan. The baseline behavior of a stationary focus was first observed and analyzed. From this, the size growth behavior for the two systems were compared. It was observed that the single focus line scan is able to produce smoother line scans in exchange for less size control. Meanwhile, the dual focus setup is able to have more control at the cost of fringed surfaces.

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Issue

2020: Proceedings of the 38th Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2020-4C-03

Section

Instrumentation, Imaging, and Signal Processing

Published

2020-10-19

How to Cite

[1]

EJVC Reyes, WDGD Improso, and GA Tapang, Comparison of single focus and dual foci scanning in single-photon photopolymerization, Proceedings of the Samahang Pisika ng Pilipinas 38, SPP-2020-4C-03 (2020). URL: https://proceedings.spp-online.org/article/view/SPP-2020-4C-03.