Stress analysis of a four-legs actuator type MEMS on a 1060 nm HCG-MEMS Tunable VCSEL
Abstract
We report on the stress experienced by a four-leg actuator type design of a 1060 nm high contrast grating (HCG) tunable vertical cavity surface emitting laser (VCSEL). With increasing tuning bias, we observed an increasing Raman shift for the GaAs TO phonon Raman peak implying an increase in tensile stress experienced by the microelectromechanical systems (MEMS) of up to 0.48 GPa.
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From laboratory to society: Physics in nation building
29 May-1 June 2019, Tagbilaran City
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