Surface morphology and elemental composition of CeO2 thin films grown by femtosecond pulsed laser deposition

Authors

  • Joseph Aban De Mesa National Institute of Physics, University of the Philippines Diliman
  • Jessa Jayne Miranda National Institute of Physics, University of the Philippines Diliman
  • Angelo Rillera National Institute of Physics, University of the Philippines Diliman
  • Roland Sarmago National Institute of Physics, University of the Philippines Diliman
  • Wilson Garcia National Institute of Physics, University of the Philippines Diliman

Abstract

Cerium oxide (CeO2) thin films have been prepared via femtosecond pulsed laser deposition (fs-PLD) technique onto the silicon (100) substrate. The deposition was carried out at varying oxygen deposition pressure at ambient temperature. The films were characterized using scanning electron microscope (SEM) and energy dispersive spectroscopy (EDS). The SEM images of as-deposited samples revealed the smooth and featureless morphology. Microcracks are observed for sample deposited at 0.1 mTorr which can be attributed to resputtering of the film during the PLD. The surface morphology of the film annealed at  shows well defined grain boundaries and porosity. The elemental surface composition of as-deposited samples indicates the stoichiometry of the grown CeO2 film. EDS data of annealed sample revealed oxygen deficient CeO2 surface.

SPP 2019 Proceedings cover

Downloads

Published

2019-05-21

Issue

2019: Proceedings of the 37th Samahang Pisika ng Pilipinas Physics Conference

Section

Poster Session PA

License

By submitting their manuscript to the Samahang Pisika ng Pilipinas (SPP) for consideration, the Authors warrant that their work is original, does not infringe on existing copyrights, and is not under active consideration for publication elsewhere.
Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Surface morphology and elemental composition of CeO2 thin films grown by femtosecond pulsed laser deposition”, Proc. SPP, vol. 37, no. 1, p. SPP-2019-PA-13, May 2019, Accessed: Apr. 01, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2019-PA-13