Effects of argon and oxygen plasma treatment on optoelectronic properties of silicon nanowires

Authors

Vladimir Manamtam Sarmiento ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Anne Marie Reyes ⋅ PH Department of Mining, Metallurgical and Materials Engineering, University of the Philippines Diliman
Arven Cafe ⋅ PH National Institute of Physics, University of the Philippines Diliman
Horace Andrew Husay ⋅ PH National Institute of Physics, University of the Philippines Diliman
Magdaleno Vasquez, Jr ⋅ PH Department of Mining, Metallurgical and Materials Engineering, University of the Philippines Diliman
Elmer Estacio ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

The effects of modification on the surface of silicon nanowires (SiNWs) by argon (Ar) and oxygen (O₂) plasma treatment were investigated. SiNWs were fabricated via metal-assisted electroless etching. The fabricated SiNWs samples were subjected to plasma treatment with different plasma source (Ar, O₂ and mixed Ar-O₂). The Raman spectra of SiNWs exhibited slight shift in peaks that due to laser heating. Based on surface wettability, subjecting SiNWs to plasma treatment decreases its surface roughness that makes the SiNWs samples hydrophilic. The percentage reflectance of the SiNWs samples have furtherly decrease that causes increase in percentage absorbance when subjected to plasma treatment. The change in I-V characteristics were also studied. Reduction on conductivity of the plasma treated SiNWs samples were observed due to the increased surface to volume ratio.

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Issue

2018: Proceedings of the 36th Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2018-PC-53

Section

Poster Session C (Mathematical Physics, Optics, and Interdisciplinary Topics)

Published

2018-06-01

How to Cite

[1]

VM Sarmiento, AM Reyes, A Cafe, HA Husay, M Vasquez, E Estacio, A Salvador, and A Somintac, Effects of argon and oxygen plasma treatment on optoelectronic properties of silicon nanowires, Proceedings of the Samahang Pisika ng Pilipinas 36, SPP-2018-PC-53 (2018). URL: https://proceedings.spp-online.org/article/view/SPP-2018-PC-53.