Reflectivity spectroscopy of the effects of successive etching of AlAs/AlGaAs Distributed Bragg Reflectors

Authors

  • Jairrus Braga Publico National Institute of Physics, University of the Philippines Diliman
  • Alexander E. De Los Reyes National Institute of Physics, University of the Philippines Diliman
  • John Daniel E. Vasquez National Institute of Physics, University of the Philippines Diliman
  • Karl Cedric V. Gonzales National Institute of Physics, University of the Philippines Diliman
  • Gerald Angelo R. Catindig National Institute of Physics, University of the Philippines Diliman
  • Elizabeth Ann P. Prieto National Institute of Physics, University of the Philippines Diliman
  • Rommel Jagus National Institute of Physics, University of the Philippines Diliman
  • Kerphy Liandro Patrocenio National Institute of Physics, University of the Philippines Diliman
  • Elmer S. Estacio National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador National Institute of Physics, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

The effects on the reflectivity spectra of successive etching of an AlAs/AlGaAs Distributed Bragg Reflector are studied. Etching was done using base piranha solution (NH4OH + H2O2 + H2O) and characterization was done using a normal reflectivity set-up. The central reflectivity of the DBR was observed at 9100Ã…, with full-width at half maximum of 875Ã…. With the design wavelength of 8500Ã…, the disparity was attributed to the error in either layer thickness or molar composition of Al in AlxGa1-xAs. The error was found improbable for Al mole fraction alone. When error caused by layer thickness was investigated, it was found that the layer thickness for AlAs was 767Ã… with 8.3% error, and AlGaAs 676Ã… with 10.6% error. Each successive etching reduced the peak reflectance and increased the full-width at half maximum of the reflectance spectra. A big drop in reflectivity was also observed after the 6th etching, and the peak reflectivity of the DBR were less than the expected values. These observations were attributed to the changes in the etchant and the surface morphology produced by etching.

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Issue

2018: Proceedings of the 36th Samahang Pisika ng Pilipinas Physics Conference

Section

Poster Session C (Mathematical Physics, Optics, and Interdisciplinary Topics)

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How to Cite

[1]
“Reflectivity spectroscopy of the effects of successive etching of AlAs/AlGaAs Distributed Bragg Reflectors”, Proc. SPP, vol. 36, no. 1, p. SPP-2018-PC-49, Jun. 2018, Accessed: Apr. 01, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2018-PC-49