Dynamic Spectro-Polarimetry/Ellipsometry: Theory and applications
In this talk, we describe Dynamic Spectro-Polarimetry/Ellipsometry, which is based on snapshot spectral interferometric polarization modulation. The proposed Dynamic SP/SE can extract the spectral phase difference between p- and s-polarization of the transmitted/reflected wave from periodic nanopatterns or thin films. DSP/DSE has no moving parts, and it is extremely robust to external vibration although it employs an interferometric scheme due to its unique optical design. Dynamic spectro-polarization measurement capability is demonstrated for anisotropic objects such as achromatic quarter-wave plates and periodic nanopatterned objects by extracting the spectral Stokes vector in real time speed. High precision and high speed capability make the proposed system ideal for large-scale real-time process monitoring and control in various applications of semiconductor and display manufacturing fields.