Fabrication of wavelength-tunable and small-signal modulated VCSEL emitting at the 850 nm regime

Authors

  • Anthony Rustia Tuico Materials Science and Engineering Program, University of the Philippines Diliman
  • Philippe Martin Tingzon Materials Science and Engineering Program, University of the Philippines Diliman
  • Elizabeth Ann Prieto National Institute of Physics, University of the Philippines Diliman
  • Kevin Cook Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
  • Marc Rosales Electrical and Electronics Engineering Institute, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador National Institute of Physics, University of the Philippines Diliman
  • Elmer Estacio National Institute of Physics, University of the Philippines Diliman
  • Connie Chang-Hasnain Department of Electrical Engineering and Computer Sciences, University of California, Berkeley

Abstract

We report on the fabrication of an oxide-confined 850 nm VCSEL capable of wavelength tuning and small-signal modulation. The wavelength tuning is enabled by actuating a suspended high-contrast grating (HCG) with micro-electro-mechanical structures (MEMS). A resonant frequency up to 6.3 GHz was obtained by small-signal modulation on the fabricated VCSEL with all-top metal contact. The integration of wavelength tuning and high direct-modulation speed in a single VCSEL is deemed promising for high speed data communication applications.

SPP 2018 Proceedings cover

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Published

2018-05-26

Issue

2018: Proceedings of the 36th Samahang Pisika ng Pilipinas Physics Conference

Section

Condensed Matter Physics and Materials Science

License

By submitting their manuscript to the Samahang Pisika ng Pilipinas (SPP) for consideration, the Authors warrant that their work is original, does not infringe on existing copyrights, and is not under active consideration for publication elsewhere.
Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Fabrication of wavelength-tunable and small-signal modulated VCSEL emitting at the 850 nm regime”, Proc. SPP, vol. 36, no. 1, pp. SPP–2018, May 2018, Accessed: Mar. 27, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2018-3C-03