Fabrication of wavelength-tunable and small-signal modulated VCSEL emitting at the 850 nm regime

Authors

Anthony Rustia Tuico ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Philippe Martin Tingzon ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Elizabeth Ann Prieto ⋅ PH National Institute of Physics, University of the Philippines Diliman
Kevin Cook ⋅ US Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
Marc Rosales ⋅ PH Electrical and Electronics Engineering Institute, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Elmer Estacio ⋅ PH National Institute of Physics, University of the Philippines Diliman
Connie Chang-Hasnain ⋅ US Department of Electrical Engineering and Computer Sciences, University of California, Berkeley

Abstract

We report on the fabrication of an oxide-confined 850 nm VCSEL capable of wavelength tuning and small-signal modulation. The wavelength tuning is enabled by actuating a suspended high-contrast grating (HCG) with micro-electro-mechanical structures (MEMS). A resonant frequency up to 6.3 GHz was obtained by small-signal modulation on the fabricated VCSEL with all-top metal contact. The integration of wavelength tuning and high direct-modulation speed in a single VCSEL is deemed promising for high speed data communication applications.

Downloads

Issue

2018: Proceedings of the 36th Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2018-3C-03

Section

Condensed Matter Physics and Materials Science

Published

2018-05-26

How to Cite

[1]

AR Tuico, PM Tingzon, EA Prieto, K Cook, M Rosales, A Somintac, A Salvador, E Estacio, and C Chang-Hasnain, Fabrication of wavelength-tunable and small-signal modulated VCSEL emitting at the 850 nm regime, Proceedings of the Samahang Pisika ng Pilipinas 36, SPP-2018-3C-03 (2018). URL: https://proceedings.spp-online.org/article/view/SPP-2018-3C-03.