Fabrication of high contrast gratings (HCG) MEMS-tunable 1060 nm VCSELs with 32 nm electrostatic tuning range
Abstract
We report the fabrication of a 1060 nm high contrast grating (HCG) microelectromechanical system (MEMS)-tunable vertical cavity surface emitting laser (VCSEL). An electrostatic tuning range of 32 nm was achieved. A mechanical resonant frequency at around 440 kHz was achieved via dynamic actuation of the MEMS, an f$_{3dB}$ at around 700 kHz with a quality factor of 2.33.
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Building bridges and exploring frontiers
6-9 June 2018, Puerto Princesa City
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