Fabrication of high contrast gratings (HCG) MEMS-tunable 1060 nm VCSELs with 32 nm electrostatic tuning range

Authors

Philippe Martin Baguio Tingzon Materials Science and Engineering Program, University of the Philippines Diliman
Neil Irvin Cabello National Institute of Physics, University of the Philippines Diliman
John Jairus Eslit Electrical and Electronics Engineering Institute, University of the Philippines Diliman
Kevin Cook Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
Jonas Kapraun Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
Marc Rosales Electrical and Electronics Engineering Institute, University of the Philippines Diliman
Armando Somintac National Institute of Physics, University of the Philippines Diliman
Arnel Salvador National Institute of Physics, University of the Philippines Diliman
Elmer Estacio National Institute of Physics, University of the Philippines Diliman
Connie Chang-Hasnain Department of Electrical Engineering and Computer Sciences, University of California, Berkeley

Abstract

We report the fabrication of a 1060 nm high contrast grating (HCG) microelectromechanical system (MEMS)-tunable vertical cavity surface emitting laser (VCSEL). An electrostatic tuning range of 32 nm was achieved. A mechanical resonant frequency at around 440 kHz was achieved via dynamic actuation of the MEMS, an f$_{3dB}$ at around 700 kHz with a quality factor of 2.33.

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Published

2018-05-25

How to Cite

[1]

PMB Tingzon, NI Cabello, JJ Eslit, K Cook, J Kapraun, M Rosales, A Somintac, A Salvador, E Estacio, and C Chang-Hasnain, Fabrication of high contrast gratings (HCG) MEMS-tunable 1060 nm VCSELs with 32 nm electrostatic tuning range, Proceedings of the Samahang Pisika ng Pilipinas 36, SPP-2018-1G-04 (2018). URL: https://proceedings.spp-online.org/article/view/SPP-2018-1G-04.