Fabrication of high contrast gratings (HCG) MEMS-tunable 1060 nm VCSELs with 32 nm electrostatic tuning range

Authors

Philippe Martin Baguio Tingzon ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Neil Irvin Cabello ⋅ PH National Institute of Physics, University of the Philippines Diliman
John Jairus Eslit ⋅ PH Electrical and Electronics Engineering Institute, University of the Philippines Diliman
Kevin Cook ⋅ US Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
Jonas Kapraun ⋅ US Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
Marc Rosales ⋅ PH Electrical and Electronics Engineering Institute, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Elmer Estacio ⋅ PH National Institute of Physics, University of the Philippines Diliman
Connie Chang-Hasnain ⋅ US Department of Electrical Engineering and Computer Sciences, University of California, Berkeley

Abstract

We report the fabrication of a 1060 nm high contrast grating (HCG) microelectromechanical system (MEMS)-tunable vertical cavity surface emitting laser (VCSEL). An electrostatic tuning range of 32 nm was achieved. A mechanical resonant frequency at around 440 kHz was achieved via dynamic actuation of the MEMS, an f$_{3dB}$ at around 700 kHz with a quality factor of 2.33.

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Published

2018-05-25

Issue

2018: Proceedings of the 36th Samahang Pisika ng Pilipinas Physics Conference

Section

Condensed Matter Physics and Materials Science

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How to Cite

[1]

“Fabrication of high contrast gratings (HCG) MEMS-tunable 1060 nm VCSELs with 32 nm electrostatic tuning range”, Proc. SPP, vol. 36, no. 1, pp. SPP–2018, May 2018, Accessed: Apr. 03, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2018-1G-04