Enhanced Anatase titanium dioxide nanotube formation from heat treated RF-sputtered Ti thin films

Authors

Celestino Andrew M. Borja ⋅ PH National Institute of Physics, University of the Philippines Diliman
Claude Ceniza ⋅ PH National Institute of Physics, University of the Philippines Diliman
Ed Adrian Dilla ⋅ PH National Institute of Physics, University of the Philippines Diliman
Renato Daclan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Eugenio Leynes ⋅ PH National Institute of Physics, University of the Philippines Diliman
Oliver Semblante ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel A. Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando S. Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Radio Frequency (RF) sputtered Ti films on glass were heat treated using tube furnace at temperatures from 300 – 600 oC. XRD measurements of the parent Ti films showed improvement in crystallinity and exhibited sharp peaks at 34.9(010), 38.2(002) and 40.05(011). The heat treated Ti films were anodized at 57.8V using 0.3% N₄HF in ethylene glycol as electrolyte. Raman spectra from the anodized films showed distinct TiO₂ peaks. Anatase phase was observed after anodization of heat treated Ti films at 300 and 400 oC while rutile phase exhibited dominance in films heat treated at 500 and 600 oC. Comparison in Raman peaks showed that heat treated films have improved crystal structure compared to films that did not undergo heat treatment.

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Issue

2010: Proceedings of the 28th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2010-PA-43

Section

Poster Session PA

Published

2010-10-25

How to Cite

[1]

CAM Borja, C Ceniza, EA Dilla, R Daclan, E Leynes, O Semblante, AA Salvador, and AS Somintac, Enhanced Anatase titanium dioxide nanotube formation from heat treated RF-sputtered Ti thin films, Proceedings of the Samahang Pisika ng Pilipinas 28, SPP-2010-PA-43 (2010). URL: https://proceedings.spp-online.org/article/view/SPP-2010-PA-43.