Preliminary investigation using Raman spectroscopy on nanoporous silicon
Abstract
Preliminary investigation using Raman scattering spectroscopy was performed to determine the relationship of the Raman spectra (RS) to the porosity of porous silicon (pSi). It was found that the RS peak of high porosity pSi is broader and has greater downshift as compared to that of lower porosity pSi. Measurements were done with respect to the RS of bulk crystalline silicon. It was established that the RS peak location was proportional to the increase in porosity of pSi due to strain-induced lattice mismatch. The results showed that Raman spectroscopy is a possible method for approximating the porosity of the material.