High frequency characterization of MIM capacitors for RFIC applications

Authors

Dominique Tabacon ⋅ PH National Institute of Physics, University of the Philippines Diliman
Shiela Crosby ⋅ PH National Institute of Physics, University of the Philippines Diliman
Clairecynth Yu ⋅ PH National Institute of Physics, University of the Philippines Diliman
Marie Emma Villamin ⋅ PH National Institute of Physics, University of the Philippines Diliman
Ronel Cristian Roca ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel A. Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando S. Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Three metal-insulator-metal (MIM) capacitors with different capacitance values are fabricated using polyimide dielectric and Ti/Au electrodes. High frequency characterization in the range of 70MHz – 6GHz is performed to evaluate high operating range and frequency-dependent behaviors of the capacitors. Only small variations in capacitances over the scanning frequency range are observed for all the capacitors. Capacitances are calculated to be 0.89pF, 1.70pF, and 2.22pF. Furthermore, high quality (Q) factors and high self-resonance frequencies (SRFs) with maximum values of 12.58 and 12.75 GHz, respectively, are obtained. These results indicate possible applications of the MIM capacitors in radio-frequency integrated circuits (RFICs).

Downloads

Issue

2010: Proceedings of the 28th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2010-6B-04

Section

Materials Physics

Published

2010-10-25

How to Cite

[1]

D Tabacon, S Crosby, C Yu, ME Villamin, RC Roca, AA Salvador, and AS Somintac, High frequency characterization of MIM capacitors for RFIC applications, Proceedings of the Samahang Pisika ng Pilipinas 28, SPP-2010-6B-04 (2010). URL: https://proceedings.spp-online.org/article/view/SPP-2010-6B-04.