Total light control with a DLP projector and a phase only spatial light modulator

Abstract

We propose a system for the simultaneous control of amplitude of an incident light. The system is composed of a digital light processing (DLP) chip composed of an array of dynamic micromirror device (DMD) for amplitude control and a phase only spatial light modulator (SLM) for phase modulation. The output is a convolution of the imposed amplitude constraints and the reconstruction of the phase hologram imposed on the SLM. Using the set-up, we generate multiple patterns which can be used for dynamic maskless optical lithography.