A comparison of composite TiN/a-C films produced from various carbon sources

Authors

Leo Mendel Rosario ⋅ PH National Institute of Physics, University of the Philippines Diliman and College of Arts, Sciences, and Education, FEATI University
Michelle Marie Villamayor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Rommel Paulo Viloan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Beverly Anne Suarez ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roy Tumlos ⋅ PH National Institute of Physics, University of the Philippines Diliman and Department of Physical Sciences and Mathematics, University of the Philippines Manila
Henry Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Titanium nitride (TiN)/amorphous carbon (a-C) composite films are deposited on stainless steel with various carbon sources via magnetron sputtering in a magnetized sheet plasma source. The different carbon sources used in the carbonitriding process are graphite target and acetylene and methane gases. It is shown that the carbon source used in producing TiN/a-C composite films affect film properties such as elemental content, surface morphology, TiN phases, and hardness.

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Issue

2009: Proceedings of the 27th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2009-PA-19

Section

Poster Session PA

Published

2009-10-28

How to Cite

[1]

LM Rosario, MM Villamayor, RP Viloan, BA Suarez, R Tumlos, and H Ramos, A comparison of composite TiN/a-C films produced from various carbon sources, Proceedings of the Samahang Pisika ng Pilipinas 27, SPP-2009-PA-19 (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-PA-19.