Synthesis of diamond-like carbon via PECVD using a streaming neutral gas injection hollow cathode

Authors

Aleo Paolo J. Pacho National Institute of Physics, University of the Philippines Diliman
Giovanni Malapit National Institute of Physics, University of the Philippines Diliman and Department of Physical Sciences, University of the Philippines Baguio
Emil Pares National Institute of Physics, University of the Philippines Diliman
Henry Ramos National Institute of Physics, University of the Philippines Diliman
Alexander Mendenilla National Institute of Physics, University of the Philippines Diliman

Abstract

A streaming neutral gas injection hollow cathode system was used to deposit diamond-like carbon films via plasma enhanced chemical vapor deposition on silicon and nickel-coated silicon substrates with acetylene and hydrogen as reactant gases. Samples were characterized using SEM and Raman spectroscopy. The work presented here aims to demonstrate the capability of the system to synthesize carbonaceous films and is a starting point towards work on formation of carbon nanostructures.

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Issue

2009: Proceedings of the 27th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2009-PA-13

Section

Poster Session PA

Published

2009-10-28

How to Cite

[1]

APJ Pacho, G Malapit, E Pares, H Ramos, and A Mendenilla, Synthesis of diamond-like carbon via PECVD using a streaming neutral gas injection hollow cathode, Proceedings of the Samahang Pisika ng Pilipinas 27, SPP-2009-PA-13 (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-PA-13.