Influence of deposition parameters on the properties of composite TiN/a-C films

Authors

Leo Mendel Rosario National Institute of Physics, University of the Philippines Diliman and College of Arts, Sciences, and Education, FEATI University
Rommel Viloan National Institute of Physics, University of the Philippines Diliman
Michelle Marie Villamayor National Institute of Physics, University of the Philippines Diliman
Roy Tumlos National Institute of Physics, University of the Philippines Diliman and Department of Physical Sciences and Mathematics, University of the Philippines Manila

Abstract

Composite films of titanium nitride (TiN) and amorphous carbon (a-C) were deposited on titanium coated stainless steel substrates via magnetron sputtering in a magnetized sheet plasma source. The effect of the deposition parameters, namely, gas ratio and discharge current, on the color, elemental composition, surface morphology, and hardness of the films was investigated. It was shown that the carbon content of the film can be effectively varied with the deposition parameters. For TiN/a-C films, increasing the carbon content with different deposition parameters also increases the hardness of the film. It was also shown that films with different chemical composition (titanium-carbon compound and carbon coatings) can also produced at some extreme deposition parameters.

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Issue

2009: Proceedings of the 27th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2009-PA-07

Section

Poster Session PA

Published

2009-10-28

How to Cite

[1]

LM Rosario, R Viloan, MM Villamayor, and R Tumlos, Influence of deposition parameters on the properties of composite TiN/a-C films, Proceedings of the Samahang Pisika ng Pilipinas 27, SPP-2009-PA-07 (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-PA-07.