Synthesis of multilayered and multicomponent titanium compounds using a magnetized sheet plasma source

Authors

Leo Mendel Rosario National Institute of Physics, University of the Philippines Diliman and College of Arts, Sciences, and Education, FEATI University
Rommel Paulo Viloan National Institute of Physics, University of the Philippines Diliman
Michelle Marie Villamayor National Institute of Physics, University of the Philippines Diliman
Roy Tumlos National Institute of Physics, University of the Philippines Diliman and College of Arts and Sciences, University of the Philippines Manila
Henry Ramos National Institute of Physics, University of the Philippines Diliman

Abstract

Multilayered and multicomponent titanium compounds containing carbon and nitrogen were deposited on stainless steel substrates via magnetron sputtering in a magnetized sheet plasma source. Successive layers of Ti, Ti-N, Ti-C-N, and Ti-C were deposited continuously by sputtering a Ti target with argon plasma, nitriding with N2:Ar plasma, and carbonitriding/carbiding with C2H2:N2:Ar, respectively. The elemental compositions of each layer were shown through energy dispersive x-ray analysis. The hardness of the Ti/Ti-N/Ti-C-N/Ti-C coating is found to be around 29 GPa via Vicker’s microhardness test. This multilayered coating is found to be much harder than Ti/Ti-N (24.83 GPa), Ti/Ti-C-N (23.4 GPa), Ti/Ti-C (24.83 GPa), and Ti/Ti-N/Ti-C-N (24.43) coatings on stainless steel. Aside from having a single route and continuous deposition scheme, the magnetized sheet plasma source does not involve any substrate heating in the synthesis of thin films unlike other conventional coating systems.

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Issue

2009: Proceedings of the 27th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2009-5B-05

Section

Condensed Matter Physics

Published

2009-10-28

How to Cite

[1]

LM Rosario, RP Viloan, MM Villamayor, R Tumlos, and H Ramos, Synthesis of multilayered and multicomponent titanium compounds using a magnetized sheet plasma source, Proceedings of the Samahang Pisika ng Pilipinas 27, SPP-2009-5B-05 (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-5B-05.