Synthesis of multilayered and multicomponent titanium compounds using a magnetized sheet plasma source

Authors

Leo Mendel Rosario ⋅ PH National Institute of Physics, University of the Philippines Diliman and College of Arts, Sciences, and Education, FEATI University
Rommel Paulo Viloan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michelle Marie Villamayor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roy Tumlos ⋅ PH National Institute of Physics, University of the Philippines Diliman and College of Arts and Sciences, University of the Philippines Manila
Henry Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Multilayered and multicomponent titanium compounds containing carbon and nitrogen were deposited on stainless steel substrates via magnetron sputtering in a magnetized sheet plasma source. Successive layers of Ti, Ti-N, Ti-C-N, and Ti-C were deposited continuously by sputtering a Ti target with argon plasma, nitriding with N2:Ar plasma, and carbonitriding/carbiding with C2H2:N2:Ar, respectively. The elemental compositions of each layer were shown through energy dispersive x-ray analysis. The hardness of the Ti/Ti-N/Ti-C-N/Ti-C coating is found to be around 29 GPa via Vicker’s microhardness test. This multilayered coating is found to be much harder than Ti/Ti-N (24.83 GPa), Ti/Ti-C-N (23.4 GPa), Ti/Ti-C (24.83 GPa), and Ti/Ti-N/Ti-C-N (24.43) coatings on stainless steel. Aside from having a single route and continuous deposition scheme, the magnetized sheet plasma source does not involve any substrate heating in the synthesis of thin films unlike other conventional coating systems.

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Published

2009-10-28

Issue

2009: Proceedings of the 27th Samahang Pisika ng Pilipinas Physics Congress

Section

Condensed Matter Physics

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How to Cite

[1]

Synthesis of multilayered and multicomponent titanium compounds using a magnetized sheet plasma source, Proceedings of the Samahang Pisika ng Pilipinas 27, (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-5B-05.