Transparent ZnO thin films prepared by infrared 1064 nm Nd: YAG pulsed laser deposition
Abstract
Transparent ZnO thin films were successfully prepared using infrared 1064 nm Nd: YAG pulsed laser deposition. The features of the film deposited using a sintered and unsintered target are remarkably different. Films deposited using unsintered target appeared white with high density of particulates on film surface. Transparent and yellowish film with (110) orientation were fabricated using sintered target. The coloration of the film is attributed to excessive Zn ions on the films surface.