Dynamic single-photon lithography using a programmable mask

Authors

Paul Leonard Hilario ⋅ PH National Institute of Physics, University of the Philippines Diliman
Vincent Ricardo Daria ⋅ PH National Institute of Physics, University of the Philippines Diliman
Giovanni A. Tapang ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

We demonstrate dynamic fabrication of arbitrary microstructures using single-photon lithography and a programmable mask based on a digital light projector. Arbitrary light patterns are projected to microscopic scale and illuminate a thin layer of photopolymerizable resin. Projected light patterns produced solidified resin structures with width of around 10 μm. This work shows the feasibility of using digital light projectors as alternative for dynamic optical lithography.

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Issue

2009: Proceedings of the 27th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2009-4B-05

Section

Semiconductor Physics

Published

2009-10-28

How to Cite

[1]

PL Hilario, VR Daria, and GA Tapang, Dynamic single-photon lithography using a programmable mask, Proceedings of the Samahang Pisika ng Pilipinas 27, SPP-2009-4B-05 (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-4B-05.