Dynamic single-photon lithography using a programmable mask
Abstract
We demonstrate dynamic fabrication of arbitrary microstructures using single-photon lithography and a programmable mask based on a digital light projector. Arbitrary light patterns are projected to microscopic scale and illuminate a thin layer of photopolymerizable resin. Projected light patterns produced solidified resin structures with width of around 10 μm. This work shows the feasibility of using digital light projectors as alternative for dynamic optical lithography.
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Scouting the grand vista: From curiosity-driven research to real world application
28-30 October 2009, Development Academy of the Philippines Convention Center, Tagaytay City