Fabrication of LC series integrated circuit for RF applications
Abstract
An inductor-capacitor (LC) band pass filter circuit was fabricated using multiple photolithography of discrete components. RF characterization shows peak transmission frequency at 870MHz and band width of ~700MHz. Results also show that the device has low quality factor of around 0.34 at 870MHz which is mainly due to very thin metal structures of ~0.1μm. Parasitic capacitance of the inductor was also observed. This led to poor filtering quality at high frequencies beyond 1.9GHz. The same technique can also be used to create more complicated circuits such as low-noise-amplifiers.