Fabrication of LC series integrated circuit for RF applications

Authors

  • Ronel Christian Roca ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Maria Emma Villamin ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Fritz Christian Awitan ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Neil Cabello ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Ma. Herminia Balgos ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Dominique Tabacon ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Jennifer Anne Constantino ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Michael Defensor ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Armando S. Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Maria Theresa Gusad ⋅ PH Department of Electrical and Electronics Engineering, University of the Philippines Diliman

Abstract

An inductor-capacitor (LC) band pass filter circuit was fabricated using multiple photolithography of discrete components. RF characterization shows peak transmission frequency at 870MHz and band width of ~700MHz. Results also show that the device has low quality factor of around 0.34 at 870MHz which is mainly due to very thin metal structures of ~0.1μm. Parasitic capacitance of the inductor was also observed. This led to poor filtering quality at high frequencies beyond 1.9GHz. The same technique can also be used to create more complicated circuits such as low-noise-amplifiers.

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Issue

Article ID

SPP-2009-4B-02

Section

Semiconductor Physics

Published

2009-10-28

How to Cite

[1]
RC Roca, ME Villamin, FC Awitan, N Cabello, MH Balgos, D Tabacon, JA Constantino, M Defensor, AS Somintac, A Salvador, and MT Gusad, Fabrication of LC series integrated circuit for RF applications, Proceedings of the Samahang Pisika ng Pilipinas 27, SPP-2009-4B-02 (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-4B-02.