Fabrication and characterization of interdigitated capacitors for MMIC applications

Authors

Maria Emma Villamin ⋅ PH National Institute of Physics, University of the Philippines Diliman
Ronel Christian Roca ⋅ PH National Institute of Physics, University of the Philippines Diliman
Fritz Christian Awitan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Neil Cabello ⋅ PH National Institute of Physics, University of the Philippines Diliman
Ma. Herminia Balgos ⋅ PH National Institute of Physics, University of the Philippines Diliman
Nemesio Mangila ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jennifer Anne Constantino ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michael Defensor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Maria Theresa Gusad ⋅ PH Department of Electrical and Electronics Engineering, University of the Philippines Diliman

Abstract

Planar interdigitated capacitors (IDCs) for GaAs based microwave monolithic integrated circuit (MMIC) applications were successfully fabricated using standard fabrication process. Electroplating was also used to have thicker Au metal conductor strips of the IDCs. The two fabricated IDCs have the same fingers width (w=10um) and length (L=500um) but differ in number of metal fingers (N1=26 & N2=9) and spacing between fingers (S1=10um & S2=45um). Measured capacitances and Q-factors for IDC with N=26 is 1.2pF and Q=9 at 550MHz while for N=9 the capacitance is 0.6031pF and Q=16 at 300MHz.

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Issue

2009: Proceedings of the 27th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2009-4B-01

Section

Semiconductor Physics

Published

2009-10-28

How to Cite

[1]

ME Villamin, RC Roca, FC Awitan, N Cabello, MH Balgos, N Mangila, JA Constantino, M Defensor, A Somintac, A Salvador, and MT Gusad, Fabrication and characterization of interdigitated capacitors for MMIC applications, Proceedings of the Samahang Pisika ng Pilipinas 27, SPP-2009-4B-01 (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-4B-01.