Optical emission spectroscopy of multilayered Ti/TiN/TiCN deposition in a magnetized sheet plasma source
Abstract
Investigation on the deposition of multilayered Ti/TiN/TiCN on stainless steel substrate using a magnetized sheet plasma source is done using optical emission spectroscopy. The active chemical species are determined for different plasma processes (sputtering, nitriding, and carbonitriding) and for varying carbon sources (graphite target, acetylene, and methane). The effect of the deposition parameters, namely, acetylene percentage and discharge current, on the populations of the active species was also investigated.
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Scouting the grand vista: From curiosity-driven research to real world application
28-30 October 2009, Development Academy of the Philippines Convention Center, Tagaytay City