Optical emission spectroscopy of multilayered Ti/TiN/TiCN deposition in a magnetized sheet plasma source

Authors

Julie Anne S. Ting ⋅ PH National Institute of Physics, University of the Philippines Diliman
Leo Mendel D. Rosario ⋅ PH National Institute of Physics, University of the Philippines Diliman and College of Arts, Sciences, and Education, FEATI University
Rommel Paulo B. Viloan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michelle Marie S. Villamayor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roy B. Tumlos ⋅ PH National Institute of Physics, University of the Philippines Diliman and Department of Physical Sciences and Mathematics, University of the Philippines Manila
Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Investigation on the deposition of multilayered Ti/TiN/TiCN on stainless steel substrate using a magnetized sheet plasma source is done using optical emission spectroscopy. The active chemical species are determined for different plasma processes (sputtering, nitriding, and carbonitriding) and for varying carbon sources (graphite target, acetylene, and methane). The effect of the deposition parameters, namely, acetylene percentage and discharge current, on the populations of the active species was also investigated.

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Issue

2009: Proceedings of the 27th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2009-3A-01

Section

Photonics and Spectroscopy

Published

2009-10-28

How to Cite

[1]

JAS Ting, LMD Rosario, RPB Viloan, MMS Villamayor, RB Tumlos, and HJ Ramos, Optical emission spectroscopy of multilayered Ti/TiN/TiCN deposition in a magnetized sheet plasma source, Proceedings of the Samahang Pisika ng Pilipinas 27, SPP-2009-3A-01 (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-3A-01.