Instrumentation of electron beam induced current and absorbed current imaging for a scanning electron microscope

Authors

Jeremy G. Porquez ⋅ PH National Institute of Physics, University of the Philippines Diliman
Aleena Maria K. Laganapan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michael J. Defensor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando S. Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel A. Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

The design and development of electron beam induced current (EBIC) and sample current characterization are made possible through interfacing various laboratory equipments such as a picoammeter, current preamplifier, PCI-board with analogdigital inputs and a desktop personal computer (PC). Although EBIC imaging is already a widely used characterization technique in the semiconductor industry, we present the technique which is easily made by an academic institution. Results show successful acquisition of secondary electron (SE), EBIC and absorbed current images for a GaAs-based PIN semiconductor and a Silicon photodiode.

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Issue

2009: Proceedings of the 27th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2009-2A-04

Section

Photonics and Spectroscopy

Published

2009-10-28

How to Cite

[1]

JG Porquez, AMK Laganapan, MJ Defensor, AS Somintac, and AA Salvador, Instrumentation of electron beam induced current and absorbed current imaging for a scanning electron microscope, Proceedings of the Samahang Pisika ng Pilipinas 27, SPP-2009-2A-04 (2009). URL: https://proceedings.spp-online.org/article/view/SPP-2009-2A-04.