Synthesis of titanium copper nitride films on Cu and SS substrates using a magnetized sheet plasma negative ion source

Authors

Michelle Marie S. Villamayor National Institute of Physics, University of the Philippines Diliman
April M. Ulano National Institute of Physics, University of the Philippines Diliman
Beverly Anne T. Suarez National Institute of Physics, University of the Philippines Diliman
Henry J. Ramos National Institute of Physics, University of the Philippines Diliman

Abstract

Titanium copper nitride (TiCuN) films were synthesized using a magnetized sheet plasma negative ion source (MSPNIS) with the addition of two samarium-cobalt (SmCo) magnets at the base of the extraction chamber to enhance titanium sputtering. Two types of substrates for deposition were exposed to the plasma namely copper (Cu) and stainless steel (SS). X-ray diffraction analysis of the samples verified the presence of TiCuN and SEM results show that the surface morphology of the samples changed.

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Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-PA-50

Section

Poster Session A (Materials, Optical, and Plasma Physics)

Published

2008-10-22

How to Cite

[1]

MMS Villamayor, AM Ulano, BAT Suarez, and HJ Ramos, Synthesis of titanium copper nitride films on Cu and SS substrates using a magnetized sheet plasma negative ion source, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-PA-50 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-PA-50.