Simulation of ion trajectories in the enhancement of TiN deposition and TiCuN synthesis in a magnetized sheet plasma

Authors

Henry V. Lee Jr. ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michelle S. Villamayor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Hamdi Muhyuddin D. Barra ⋅ PH National Institute of Physics, University of the Philippines Diliman and Physics Department, Mindanao State University – Main Campus, Marawi City
Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Ion trajectories for a Sheet Plasma Negative Ion Source (SPNIS) were simulated to show how the addition of Samarium-cobalt (Sm-Co) magnets at the base of the extraction chamber would increase the sputtering yield of Titanium (Ti) ions and neutrals and deposition rate of Titanium nitride (TiN). It is demonstrated that the resulting magnetic field would alter ion trajectories such that there would be an increase in the amount of ions hitting the target, resulting to an enhancement of Ti sputtering yield and TiN deposition rate.

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Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-PA-47

Section

Poster Session A (Materials, Optical, and Plasma Physics)

Published

2008-10-22

How to Cite

[1]

HV Lee, MS Villamayor, HMD Barra, and HJ Ramos, Simulation of ion trajectories in the enhancement of TiN deposition and TiCuN synthesis in a magnetized sheet plasma, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-PA-47 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-PA-47.