Synthesis of TiAlN on stainless steel substrate using a magnetized sheet plasma source

Authors

Michelle Villamayor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Leo Mendel Rosario ⋅ PH National Institute of Physics, University of the Philippines Diliman
Carolina Lim ⋅ PH National Institute of Physics, University of the Philippines Diliman
Andrew Bañas ⋅ PH National Institute of Physics, University of the Philippines Diliman
Henry Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

A magnetized sheet plasma (13x20 cm² with a few millimeter thickness) source was used for the deposition (no substrate heating and biasing) of titanium aluminum nitride (TiAlN) on stainless steel substrates. Titanium and aluminum plates placed above SmCo magnets (2.2 kG) were sputtered by argon plasma produced at plasma current of 4 A and a discharge potential of 70 V under a total gas filling pressure of 9x10^-3 Torr. Reactive nitrogen gas is then fed to the system in N₂/Ar ratios of 1:2, 1:3, 1:5, 1:8, and 1:10 all at 4x10^-2 Torr gas filling pressure.

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Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-PA-35

Section

Poster Session A (Materials, Optical, and Plasma Physics)

Published

2008-10-22

How to Cite

[1]

M Villamayor, LM Rosario, C Lim, A Bañas, and H Ramos, Synthesis of TiAlN on stainless steel substrate using a magnetized sheet plasma source, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-PA-35 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-PA-35.