Design and fabrication of DC planar magnetron using concentric annular ceramic magnets

Authors

Joey Arles O. Vergara College of Arts and Sciences, Northern Mindanao State Institute of Science and Technology
Ivan B. Culaba Department of Physics, Ateneo de Manila University

Abstract

A DC magnetron sputtering system was previously developed [H. J. Unidad and I. B. Culaba, Pisika 1(1), 30 (2007)] using four pairs of neodymium magnets. In this present work, a new magnetic field configuration is presented using two annular concentric magnets. The glow discharge profile is presented via the Paschen curve and the current-voltage relationship. The configuration produced highly symmetric doughnut shaped plasma near the target surface, which resulted to a circular erosion site on the cathode target.

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Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-3B-01

Section

Optics and Plasma Physics

Published

2008-10-22

How to Cite

[1]

JAO Vergara and IB Culaba, Design and fabrication of DC planar magnetron using concentric annular ceramic magnets, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-3B-01 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-3B-01.