Design and fabrication of DC planar magnetron using concentric annular ceramic magnets

Authors

Joey Arles O. Vergara ⋅ PH College of Arts and Sciences, Northern Mindanao State Institute of Science and Technology
Ivan B. Culaba ⋅ PH Department of Physics, Ateneo de Manila University

Abstract

A DC magnetron sputtering system was previously developed [H. J. Unidad and I. B. Culaba, Pisika 1(1), 30 (2007)] using four pairs of neodymium magnets. In this present work, a new magnetic field configuration is presented using two annular concentric magnets. The glow discharge profile is presented via the Paschen curve and the current-voltage relationship. The configuration produced highly symmetric doughnut shaped plasma near the target surface, which resulted to a circular erosion site on the cathode target.

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Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-3B-01

Section

Optics and Plasma Physics

Published

2008-10-22

How to Cite

[1]

JAO Vergara and IB Culaba, Design and fabrication of DC planar magnetron using concentric annular ceramic magnets, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-3B-01 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-3B-01.