Design and fabrication of DC planar magnetron using concentric annular ceramic magnets

Abstract

A DC magnetron sputtering system was previously developed [H. J. Unidad and I. B. Culaba, Pisika 1(1), 30 (2007)] using four pairs of neodymium magnets. In this present work, a new magnetic field configuration is presented using two annular concentric magnets. The glow discharge profile is presented via the Paschen curve and the current-voltage relationship. The configuration produced highly symmetric doughnut shaped plasma near the target surface, which resulted to a circular erosion site on the cathode target.