Fabrication and characterization of MIM micro-capacitor

Authors

Maria Emma Villamin National Institute of Physics, University of the Philippines Diliman
Ronel Christian Roca National Institute of Physics, University of the Philippines Diliman
Fritz Christian Awitan National Institute of Physics, University of the Philippines Diliman
Jonathan Azares National Institute of Physics, University of the Philippines Diliman
Jennifer Anne Constantino National Institute of Physics, University of the Philippines Diliman
Michael Defensor National Institute of Physics, University of the Philippines Diliman
Armando Somintac National Institute of Physics, University of the Philippines Diliman
Arnel Salvador National Institute of Physics, University of the Philippines Diliman
Marc Rosales Department of Electrical and Electronics Engineering, University of the Philippines Diliman

Abstract

A metal-insulator-metal (MIM) micro-capacitor for monolithic microwave integrated circuit (MMIC) applications was successfully fabricated at the Condensed Matter Physics Laboratory. The measured capacitance of the device, with area of 200μm x 200μm, is around ~1.7pF and a Q-factor of as high as 20 at 70MHz. The self-resonant frequency of the capacitor is very far from its operating frequency which allows almost ideal behavior in the microwave range.

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Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-3A-01

Section

Materials Physics

Published

2008-10-22

How to Cite

[1]

ME Villamin, RC Roca, FC Awitan, J Azares, JA Constantino, M Defensor, A Somintac, A Salvador, and M Rosales, Fabrication and characterization of MIM micro-capacitor, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-3A-01 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-3A-01.