Fabrication and characterization of MIM micro-capacitor

Authors

Maria Emma Villamin ⋅ PH National Institute of Physics, University of the Philippines Diliman
Ronel Christian Roca ⋅ PH National Institute of Physics, University of the Philippines Diliman
Fritz Christian Awitan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jonathan Azares ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jennifer Anne Constantino ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michael Defensor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Marc Rosales ⋅ PH Department of Electrical and Electronics Engineering, University of the Philippines Diliman

Abstract

A metal-insulator-metal (MIM) micro-capacitor for monolithic microwave integrated circuit (MMIC) applications was successfully fabricated at the Condensed Matter Physics Laboratory. The measured capacitance of the device, with area of 200μm x 200μm, is around ~1.7pF and a Q-factor of as high as 20 at 70MHz. The self-resonant frequency of the capacitor is very far from its operating frequency which allows almost ideal behavior in the microwave range.

Downloads

Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-3A-01

Section

Materials Physics

Published

2008-10-22

How to Cite

[1]

ME Villamin, RC Roca, FC Awitan, J Azares, JA Constantino, M Defensor, A Somintac, A Salvador, and M Rosales, Fabrication and characterization of MIM micro-capacitor, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-3A-01 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-3A-01.