Fabrication and characterization of MIM micro-capacitor

Authors

Maria Emma Villamin ⋅ PH National Institute of Physics, University of the Philippines Diliman
Ronel Christian Roca ⋅ PH National Institute of Physics, University of the Philippines Diliman
Fritz Christian Awitan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jonathan Azares ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jennifer Anne Constantino ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michael Defensor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Marc Rosales ⋅ PH Department of Electrical and Electronics Engineering, University of the Philippines Diliman

Abstract

A metal-insulator-metal (MIM) micro-capacitor for monolithic microwave integrated circuit (MMIC) applications was successfully fabricated at the Condensed Matter Physics Laboratory. The measured capacitance of the device, with area of 200Î¼m x 200Î¼m, is around ~1.7pF and a Q-factor of as high as 20 at 70MHz. The self-resonant frequency of the capacitor is very far from its operating frequency which allows almost ideal behavior in the microwave range.

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Published

2008-10-22

Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Section

Materials Physics

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How to Cite

[1]

“Fabrication and characterization of MIM micro-capacitor”, Proc. SPP, vol. 26, no. 1, pp. SPP–2008, Oct. 2008, Accessed: May 06, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2008-3A-01