Metal nanoparticles deposition on silicon substrate using ultrathin anodic aluminum oxide (AAO) template
Abstract
Ordered metal nanoparticles deposition already found numerous and diverse applications in the field of nanotechnology. In this paper, we report the initial results of the growth of metal nanoparticles on a silicon substrate using ultrathin AAO template. FE-SEM images have shown that both electron beam evaporation and electrolysis can be used in the deposition of metal nanoparticles to Si substrates. Average metal nanoparticle size is found to be 25nm in diameter, which is almost half that of the average AAO pore size of 45nm.
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