Metal nanoparticles deposition on silicon substrate using ultrathin anodic aluminum oxide (AAO) template

Authors

Regine A. Loberternos ⋅ PH National Institute of Physics, University of the Philippines Diliman
Oliver D. Semblante ⋅ PH National Institute of Physics, University of the Philippines Diliman
Rogelio G. Dizon ⋅ PH National Institute of Physics, University of the Philippines Diliman
Dona May O. Taguba ⋅ PH Department of Physical Sciences, University of the Philippines Baguio
Olive Ann Jennifer T. Valdez ⋅ PH Department of Physical Sciences, University of the Philippines Baguio
Joel P. Bugne ⋅ PH Department of Physical Sciences, University of the Philippines Baguio
Arnel A. Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando S. Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Ordered metal nanoparticles deposition already found numerous and diverse applications in the field of nanotechnology. In this paper, we report the initial results of the growth of metal nanoparticles on a silicon substrate using ultrathin AAO template. FE-SEM images have shown that both electron beam evaporation and electrolysis can be used in the deposition of metal nanoparticles to Si substrates. Average metal nanoparticle size is found to be 25nm in diameter, which is almost half that of the average AAO pore size of 45nm.

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Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-2A-02

Section

Materials Physics

Published

2008-10-22

How to Cite

[1]

RA Loberternos, OD Semblante, RG Dizon, DMO Taguba, OAJT Valdez, JP Bugne, AA Salvador, and AS Somintac, Metal nanoparticles deposition on silicon substrate using ultrathin anodic aluminum oxide (AAO) template, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-2A-02 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-2A-02.