Triboelectrification of hydrocarbon solvents during wafer machining

Abstract

We presented an experimental technique in measuring contact electrification or triboelectrification of hydrocarbon solvents during wafer machining of GMR (Giant Magneto Resistive) slider. Electrostatic charge production or contact voltage signal generation on hydrocarbon solvents were both measured and analyzed with different experimental parameters (e.g. contact materials, speed, contact time, and viscosity). Results show that triboelectrification of hydrocarbon solvents increases with speed and contact time of the fluid with the wafer, shearing the interface between the GMR slider and hydrocarbon solvent.