Effect of using variable extractor voltage in N⁺ plasma-enhanced chemical vapor deposition on substrate land pads

Authors

Maria Celine P. Alarcon ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Dennis Evan Balacano ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Astrid Ayla Liberato ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Deorex David Navaja ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Surface modification for improved wetting of substrate land pads was done in this research using PECVD. N₂ ion source was used and the effect of N⁺ plasma with varying extractor potentials on the surface properties was examined using topographical AFM analysis, cross-sectional SEM, and EDS analysis. From the AFM surface roughness calculations, as the accelerating voltage is increased, the smoothness of the substrate surface is improved. This supports the theory that higher energy ions provided by higher accelerating voltage results in a higher impact bombardment of surfaces. The flux-supplied solder ball attachment produced generally the same cross-sections with contact angles approximately measuring 75°.

Downloads

Issue

2006: Proceedings of the 24th Samahang Pisika ng Pilipinas National Physics Congress

Article ID

SPP-2006-2B-03

Section

Materials Science

Published

2006-10-25

How to Cite

[1]

MCP Alarcon, DE Balacano, AA Liberato, DD Navaja, and HJ Ramos, Effect of using variable extractor voltage in N+ plasma-enhanced chemical vapor deposition on substrate land pads, Proceedings of the Samahang Pisika ng Pilipinas 24, SPP-2006-2B-03 (2006). URL: https://proceedings.spp-online.org/article/view/SPP-2006-2B-03.