Optimization studies of a 2.45 GHz microwave argon plasma with varying distances between two repelling hexapoles

Authors

  • Roy B. Tumlos Department of Physical Sciences and Mathematics, University of the Philippines Manila
  • Marko E. Arciaga National Institute of Physics, University of the Philippines Diliman
  • April M. Ulano National Institute of Physics, University of the Philippines Diliman
  • Henry V. Lee, Jr. National Institute of Physics, University of the Philippines Diliman
  • Ivan T. Yanson National Institute of Physics, University of the Philippines Diliman

Abstract

The electron density and electron temperature of a new 2.45 GHz microwave argon plasma device were determined for different stub tuner settings and different separation distances between its two repelling hexapoles to establish the optimum settings for the device. Measurements were taken by a single langmuir probe at different radial positions along the z = 0 plane between the two hexapoles. The optimum setting of the device for high-density and low-energy plasma applications is (1â„2 1 1â„2) stub tuners and 1-cm hexapole separations. For high-density and high-energy applications, it should be operated at (1â„2 1 1â„2) and 3-cm separation. The maximum electron density and electron temperature reached are 2.5×1010 cm−3 and 3.8 eV, respectively.

SPP 2006 Proceedings Cover

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Published

2006-10-25

Issue

2006: Proceedings of the 24th Samahang Pisika ng Pilipinas National Physics Congress

Section

Instrumentation and Optics

License

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All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Optimization studies of a 2.45 GHz microwave argon plasma with varying distances between two repelling hexapoles”, Proc. SPP, vol. 24, no. 1, pp. SPP–2006, Oct. 2006, Accessed: Mar. 31, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2006-2A-04