Optimization studies of a 2.45 GHz microwave argon plasma with varying distances between two repelling hexapoles

Authors

Roy B. Tumlos ⋅ PH Department of Physical Sciences and Mathematics, University of the Philippines Manila
Marko E. Arciaga ⋅ PH National Institute of Physics, University of the Philippines Diliman
April M. Ulano ⋅ PH National Institute of Physics, University of the Philippines Diliman
Henry V. Lee, Jr. ⋅ PH National Institute of Physics, University of the Philippines Diliman
Ivan T. Yanson ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

The electron density and electron temperature of a new 2.45 GHz microwave argon plasma device were determined for different stub tuner settings and different separation distances between its two repelling hexapoles to establish the optimum settings for the device. Measurements were taken by a single langmuir probe at different radial positions along the z = 0 plane between the two hexapoles. The optimum setting of the device for high-density and low-energy plasma applications is (1⁄2 1 1⁄2) stub tuners and 1-cm hexapole separations. For high-density and high-energy applications, it should be operated at (1⁄2 1 1⁄2) and 3-cm separation. The maximum electron density and electron temperature reached are 2.5×10¹⁰ cm⁻³ and 3.8 eV, respectively.

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Issue

2006: Proceedings of the 24th Samahang Pisika ng Pilipinas National Physics Congress

Article ID

SPP-2006-2A-04

Section

Instrumentation and Optics

Published

2006-10-25

How to Cite

[1]

RB Tumlos, ME Arciaga, AM Ulano, HV Lee, and IT Yanson, Optimization studies of a 2.45 GHz microwave argon plasma with varying distances between two repelling hexapoles, Proceedings of the Samahang Pisika ng Pilipinas 24, SPP-2006-2A-04 (2006). URL: https://proceedings.spp-online.org/article/view/SPP-2006-2A-04.