Single and double Langmuir probe characterization of an argon discharge in a microwave plasma device

Authors

Rumar Christopher A. Lledo ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roy B. Tumlos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Single and double Langmuir probes are fabricated for the characterization of an Ar discharge in a microwave plasma device. The parameters obtained for the two probes were compared and were consistent with each other. The bulk of the plasma has an electron temperature of 3 eV using the single probe and 2 eV using the double probe. The electron density is approximately 1016 m⁻³, categorizing the plasma to be over-densed. A radial profile of the electron temperature and the electron density for a single axial position for the two probes are also presented.

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Issue

2005: Proceedings of the 23rd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2005-PA-21

Section

Poster Session PA

Published

2005-10-26

How to Cite

[1]

RCA Lledo and RB Tumlos, Single and double Langmuir probe characterization of an argon discharge in a microwave plasma device, Proceedings of the Samahang Pisika ng Pilipinas 23, SPP-2005-PA-21 (2005). URL: https://proceedings.spp-online.org/article/view/SPP-2005-PA-21.