Power measurements on a 2.45 GHz microwave plasma using calorimetry and Fourier analysis

Authors

Marko E. Arciaga ⋅ PH National Institute of Physics, University of the Philippines Diliman
Rumar A. Lledo ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roy B. Tumlos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

A microwave delivery system with a 2.45-GHz magnetron and waveguide assembly is tested on an actual argon gas load in a cylindrical chamber for microwave plasma generation. The power reflected to and absorbed by a dummy load in the waveguide assembly was measured using two methods – calorimetry and Fourier analysis. It was found out that the argon plasma can absorb an average power in the range of 30-190 W depending on the settings of the 3-stub tuners and the converter stick of the waveguide assembly. It was observed that the calorimetry method gives more precise power measurements compared to the Fourier analysis method which has large uncertainty due to the modulation of the microwave signal. But still, the Fourier analysis method can be employed for estimating the range of values of absorbed power.

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Issue

2005: Proceedings of the 23rd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2005-3F-03

Section

Plasma Physics

Published

2005-10-26

How to Cite

[1]

ME Arciaga, RA Lledo, and RB Tumlos, Power measurements on a 2.45 GHz microwave plasma using calorimetry and Fourier analysis, Proceedings of the Samahang Pisika ng Pilipinas 23, SPP-2005-3F-03 (2005). URL: https://proceedings.spp-online.org/article/view/SPP-2005-3F-03.