Arbitrary time-multiplexed optical field pattern generator for fabrication of micromachines

Abstract

We propose the use of the Freeman code to translate a two-dimensional raster image into vector positions of a beam-scanning system to produce time-multiplexed optical field patterns. These arbitrary field patterns can be used for fabrication of functional micro-machines. Single-line pre-defined 2D profiles are translated directly by the beam focus into vector parameters using transverse scanning mirrors resulting to complex beam shapes generated at the focal plane of the objective lens. Laser portraits at the focus are collected by another objective and directed towards a CCD camera. This technique is demonstrated for several micromachines ranging from simple contours to more complex patterns depicting a micro-strut and a micro-cogwheel.