Localization and imaging of integrated circuit defect using simple optical feedback detection

Authors

Vernon Julius Cemine ⋅ PH National Institute of Physics, University of the Philippines Diliman
Bernardino Buenaobra ⋅ PH National Institute of Physics, University of the Philippines Diliman
Carlo Mar Blanca ⋅ PH National Institute of Physics, University of the Philippines Diliman
Caesar Saloma ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

High-contrast microscopy of semiconductor and metal edifices in integrated circuits is demonstrated by combining laser-scanning confocal reflectance microscopy, one-photon optical-beam-induced current (1P-OBIC) imaging, and optical feedback detection via a commercially-available semiconductor laser that also serves as the excitation source. The confocal microscope has a compact in-line arrangement with no external photodetector. Confocal and 1P-OBIC images are obtained simultaneously from the same focused beam that is scanned across the sample plane. Image pairs are processed to generate exclusive high-contrast distributions of the semiconductor, metal and dielectric sites in a GaAs photodiode array sample. The method is then utilized to demonstrate defect localization and imaging in an integrated circuit.

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Issue

2004: Proceedings of the 22nd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2004-1G-02

Section

Instrumentation Physics

Published

2004-10-25

How to Cite

[1]

VJ Cemine, B Buenaobra, CM Blanca, and C Saloma, Localization and imaging of integrated circuit defect using simple optical feedback detection, Proceedings of the Samahang Pisika ng Pilipinas 22, SPP-2004-1G-02 (2004). URL: https://proceedings.spp-online.org/article/view/SPP-2004-1G-02.