Localization and imaging of integrated circuit defect using simple optical feedback detection

Authors

Vernon Julius Cemine National Institute of Physics, University of the Philippines Diliman
Bernardino Buenaobra National Institute of Physics, University of the Philippines Diliman
Carlo Mar Blanca National Institute of Physics, University of the Philippines Diliman
Caesar Saloma National Institute of Physics, University of the Philippines Diliman

Abstract

High-contrast microscopy of semiconductor and metal edifices in integrated circuits is demonstrated by combining laser-scanning confocal reflectance microscopy, one-photon optical-beam-induced current (1P-OBIC) imaging, and optical feedback detection via a commercially-available semiconductor laser that also serves as the excitation source. The confocal microscope has a compact in-line arrangement with no external photodetector. Confocal and 1P-OBIC images are obtained simultaneously from the same focused beam that is scanned across the sample plane. Image pairs are processed to generate exclusive high-contrast distributions of the semiconductor, metal and dielectric sites in a GaAs photodiode array sample. The method is then utilized to demonstrate defect localization and imaging in an integrated circuit.

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Issue

2004: Proceedings of the 22nd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2004-1G-02

Section

Instrumentation Physics

Published

2004-10-25

How to Cite

[1]

VJ Cemine, B Buenaobra, CM Blanca, and C Saloma, Localization and imaging of integrated circuit defect using simple optical feedback detection, Proceedings of the Samahang Pisika ng Pilipinas 22, SPP-2004-1G-02 (2004). URL: https://proceedings.spp-online.org/article/view/SPP-2004-1G-02.