Optical beam-induced current microscopy with a laser diode

Authors

Vernon Julius Cemine National Institute of Physics, University of the Philippines Diliman
Bernardino Buenaobra National Institute of Physics, University of the Philippines Diliman
Carlo Mar Blanca National Institute of Physics, University of the Philippines Diliman
Caesar Saloma National Institute of Physics, University of the Philippines Diliman

Abstract

A small, simple, robust, compact and low-cost optical beam-induced current (OBIC) microscope is built with a laser diode (LD) as a light source. Dependence of the OBIC signal on LD power and LD case temperature, which is related to LD wavelength, are determined. The axial and lateral responses of OBIC microscope are also obtained and compared with that of the confocal reflectance microscope. Combining the OBIC and confocal reflectance imaging modes the microscope can discriminate microscopic semiconductor and metallic regions.

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Issue

2003: Proceedings of the 21st Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2003-1E-05

Section

Physics in Industry

Published

2003-10-22

How to Cite

[1]

VJ Cemine, B Buenaobra, CM Blanca, and C Saloma, Optical beam-induced current microscopy with a laser diode, Proceedings of the Samahang Pisika ng Pilipinas 21, SPP-2003-1E-05 (2003). URL: https://proceedings.spp-online.org/article/view/SPP-2003-1E-05.