Deposition of TiN on drill bits using a Sheet Plasma Negative Ion Source

Authors

Virginia Noguera National Institute of Physics, University of the Philippines Diliman
Marko Arciaga National Institute of Physics, University of the Philippines Diliman
Rainier Awayan National Institute of Physics, University of the Philippines Diliman
Gene Blantocas National Institute of Physics, University of the Philippines Diliman
Liza Villorente National Institute of Physics, University of the Philippines Diliman
Jonathan Monasterial National Institute of Physics, University of the Philippines Diliman
Jeni Lazarte National Institute of Physics, University of the Philippines Diliman
Jufel Hismaña National Institute of Physics, University of the Philippines Diliman
Prydex Pineda National Institute of Physics, University of the Philippines Diliman
Elaine Fabonan National Institute of Physics, University of the Philippines Diliman
Henry Ramos National Institute of Physics, University of the Philippines Diliman

Abstract

TiN films are deposited on sample drill bits using the all-stainless steel Sheet Plasma Negative Ion Source. Modification of the SPNIS glass chamber into an all-stainless chamber increased the deposition area that made simultaneous coating of at least six industrial drill bits possible. The strong TiN (200) orientation was obtained, together with the nonstoichiometric Ti₂N (220). The unfavorable columnar TiN (111) orientation is not seen on the XRD spectra of the films.

Downloads

Issue

2003: Proceedings of the 21st Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2003-1E-03

Section

Physics in Industry

Published

2003-10-22

How to Cite

[1]

V Noguera, M Arciaga, R Awayan, G Blantocas, L Villorente, J Monasterial, J Lazarte, J Hismaña, P Pineda, E Fabonan, and H Ramos, Deposition of TiN on drill bits using a Sheet Plasma Negative Ion Source, Proceedings of the Samahang Pisika ng Pilipinas 21, SPP-2003-1E-03 (2003). URL: https://proceedings.spp-online.org/article/view/SPP-2003-1E-03.