Deposition of TiN on drill bits using a Sheet Plasma Negative Ion Source
Abstract
TiN films are deposited on sample drill bits using the all-stainless steel Sheet Plasma Negative Ion Source. Modification of the SPNIS glass chamber into an all-stainless chamber increased the deposition area that made simultaneous coating of at least six industrial drill bits possible. The strong TiN (200) orientation was obtained, together with the nonstoichiometric Ti2N (220). The unfavorable columnar TiN (111) orientation is not seen on the XRD spectra of the films.
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Creating essential bridges uniting physics, society and industry
22-25 October 2003, University of San Carlos, Cebu City