Deposition of TiN on drill bits using a Sheet Plasma Negative Ion Source

Authors

Virginia Noguera ⋅ PH National Institute of Physics, University of the Philippines Diliman
Marko Arciaga ⋅ PH National Institute of Physics, University of the Philippines Diliman
Rainier Awayan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Gene Blantocas ⋅ PH National Institute of Physics, University of the Philippines Diliman
Liza Villorente ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jonathan Monasterial ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jeni Lazarte ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jufel Hismaña ⋅ PH National Institute of Physics, University of the Philippines Diliman
Prydex Pineda ⋅ PH National Institute of Physics, University of the Philippines Diliman
Elaine Fabonan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Henry Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

TiN films are deposited on sample drill bits using the all-stainless steel Sheet Plasma Negative Ion Source. Modification of the SPNIS glass chamber into an all-stainless chamber increased the deposition area that made simultaneous coating of at least six industrial drill bits possible. The strong TiN (200) orientation was obtained, together with the nonstoichiometric Ti₂N (220). The unfavorable columnar TiN (111) orientation is not seen on the XRD spectra of the films.

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Issue

2003: Proceedings of the 21st Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2003-1E-03

Section

Physics in Industry

Published

2003-10-22

How to Cite

[1]

V Noguera, M Arciaga, R Awayan, G Blantocas, L Villorente, J Monasterial, J Lazarte, J Hismaña, P Pineda, E Fabonan, and H Ramos, Deposition of TiN on drill bits using a Sheet Plasma Negative Ion Source, Proceedings of the Samahang Pisika ng Pilipinas 21, SPP-2003-1E-03 (2003). URL: https://proceedings.spp-online.org/article/view/SPP-2003-1E-03.