Deposition of TiN on drill bits using a Sheet Plasma Negative Ion Source

Authors

  • Virginia Noguera National Institute of Physics, University of the Philippines Diliman
  • Marko Arciaga National Institute of Physics, University of the Philippines Diliman
  • Rainier Awayan National Institute of Physics, University of the Philippines Diliman
  • Gene Blantocas National Institute of Physics, University of the Philippines Diliman
  • Liza Villorente National Institute of Physics, University of the Philippines Diliman
  • Jonathan Monasterial National Institute of Physics, University of the Philippines Diliman
  • Jeni Lazarte National Institute of Physics, University of the Philippines Diliman
  • Jufel Hismaña National Institute of Physics, University of the Philippines Diliman
  • Prydex Pineda National Institute of Physics, University of the Philippines Diliman
  • Elaine Fabonan National Institute of Physics, University of the Philippines Diliman
  • Henry Ramos National Institute of Physics, University of the Philippines Diliman

Abstract

TiN films are deposited on sample drill bits using the all-stainless steel Sheet Plasma Negative Ion Source. Modification of the SPNIS glass chamber into an all-stainless chamber increased the deposition area that made simultaneous coating of at least six industrial drill bits possible. The strong TiN (200) orientation was obtained, together with the nonstoichiometric Ti2N (220). The unfavorable columnar TiN (111) orientation is not seen on the XRD spectra of the films.

SPP 2003 Proceedings Cover

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Published

2003-10-22

Issue

2003: Proceedings of the 21st Samahang Pisika ng Pilipinas Physics Congress

Section

Physics in Industry

License

By submitting their manuscript to the Samahang Pisika ng Pilipinas (SPP) for consideration, the Authors warrant that their work is original, does not infringe on existing copyrights, and is not under active consideration for publication elsewhere.
Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Deposition of TiN on drill bits using a Sheet Plasma Negative Ion Source”, Proc. SPP, vol. 21, no. 1, pp. SPP–2003, Oct. 2003, Accessed: Mar. 29, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2003-1E-03