GPIB-controlled electrostatic energy analyzer in a plasma sputter-type negative ion source

Authors

Miguel L. Yambot ⋅ PH National Institute of Physics, University of the Philippines Diliman
Alexander G. Mendenilla ⋅ PH National Institute of Physics, University of the Philippines Diliman
Nico B. Valmoria ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roy B. Tumlos ⋅ PH National Institute of Physics, University of the Philippines Diliman
Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Ion beam applications such as ion implantation can be studied using the Plasma Sputter-type Negative Ion Source (PSNIS) developed by Ramos, et al., in the Plasma Research Laboratory. Sufficient beam current density and diameter is a requirement for ion beam applications such as surface modification or film deposition. Manipulation of the beam, during transit to the target chamber by mcans of focusing and deflection, is seen crucial to achieving optimum beam current density and beam shape at the target.
We will present the system that interfaces the control and data gathering from the electrostatic energy analyzer (ESA) using the GPIB (General Purpose Interface Bus) protocol with a computer. This automation is crucial in facilitating the experiment using the ESA and enhances the reliability of the results.
Also, in this paper, we are going to present some studies of the ion beam characterization using the retarding electrostatic energy analyzer (ESA). Then we will relate some of the data using the ESA with the Langmuir Probe measurements in the volume source. These enables us to determine the parameters, within the limited conditions that the experiments were done, in the volume source that can be manipulated to enable us to optimize the ion beam flux in the acceleration chamber.

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Issue

1998: Proceedings of the 16th National Physics Congress of the Samahang Pisika ng Pilipinas

Article ID

SPP-1998-PP-03

Section

Plasma Physics

Published

1998-10-27

How to Cite

[1]

ML Yambot, AG Mendenilla, NB Valmoria, RB Tumlos, and HJ Ramos, GPIB-controlled electrostatic energy analyzer in a plasma sputter-type negative ion source, Proceedings of the Samahang Pisika ng Pilipinas 16, SPP-1998-PP-03 (1998). URL: https://proceedings.spp-online.org/article/view/SPP-1998-PP-03.