Analysis of granular film by TXRF spectrometry

Authors

  • Pablo P. Saligan Applied Physics Research Group, Philippine Nuclear Research Institute
  • Virginia S. Calix Applied Physics Research Group, Philippine Nuclear Research Institute

Abstract

Total reflection x-ray fluorescence (TXRF) spectrometry is an XRF technique performed at very small angle of incidence such that total reflection occurs. Total reflection of x-ray is known since the 1920's. Modern TXRF was originally meant for determining very low concentration trace elements, however it is also a convenient tool for non-destructive analysis of nanometer films and surface impurities. This short report gives a brief description of the TXRF technique and some results on the use of the PNRI TXRF spectrometer to analyze granular films.

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Published

1998-10-27

How to Cite

[1]
PP Saligan and VS Calix, Analysis of granular film by TXRF spectrometry, Proceedings of the Samahang Pisika ng Pilipinas 16, SPP-1998-OP-11 (1998). URL: https://proceedings.spp-online.org/article/view/SPP-1998-OP-11.