Analysis of granular film by TXRF spectrometry

Abstract

Total reflection x-ray fluorescence (TXRF) spectrometry is an XRF technique performed at very small angle of incidence such that total reflection occurs. Total reflection of x-ray is known since the 1920's. Modern TXRF was originally meant for determining very low concentration trace elements, however it is also a convenient tool for non-destructive analysis of nanometer films and surface impurities. This short report gives a brief description of the TXRF technique and some results on the use of the PNRI TXRF spectrometer to analyze granular films.