RF-sputtered BSCCO films from various target compositions

Authors

Rex Absin ⋅ PH National Institute of Physics, University of the Philippines Diliman
Noel De Luna ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jonathan Corpuz ⋅ PH National Institute of Physics, University of the Philippines Diliman
Ian Jasper Agulo ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michelee Patricio ⋅ PH National Institute of Physics, University of the Philippines Diliman
Alipio Garcia ⋅ PH National Institute of Physics, University of the Philippines Diliman
Mahar Lagmay ⋅ PH National Institute of Geological Sciences, University of the Philippines Diliman
Antonio Villaflor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roland V. Sarmago ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Studies on the preparation and growth of superconducting BSCCO thin films are numerous because of potential microelectronic applications. Among the popular methods of producing these films is by rf-magnetron sputtering. In sputtering, however, utilizing a Bi₂Sr₂CaCu₂O_x, for instance, does not necessarily lead to a film of similar composition owing to the lack of understanding in the deposition mechanism when using multiple element oxide targets. This paper aims to investigate film characteristics deposited by rf-magnetron sputtering from various target compositions with the aim of determining the optimum target composition for the growth of superconducting 2212 thin films.

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Issue

1994: Proceedings of the 12th National Physics Congress of the Samahang Pisika ng Pilipinas

Article ID

SPP-1994-CM-10

Section

Condensed Matter Physics, Superconductivity and Materials Physics

Published

1994-10-15

How to Cite

[1]

R Absin, N De Luna, J Corpuz, IJ Agulo, M Patricio, A Garcia, M Lagmay, A Villaflor, and RV Sarmago, RF-sputtered BSCCO films from various target compositions, Proceedings of the Samahang Pisika ng Pilipinas 12, SPP-1994-CM-10 (1994). URL: https://proceedings.spp-online.org/article/view/SPP-1994-CM-10.