RF-sputtered BSCCO films from various target compositions

Authors

  • Rex Absin ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Noel De Luna ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Jonathan Corpuz ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Ian Jasper Agulo ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Michelee Patricio ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Alipio Garcia ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Mahar Lagmay ⋅ PH National Institute of Geological Sciences, University of the Philippines Diliman
  • Antonio Villaflor ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Roland V. Sarmago ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Studies on the preparation and growth of superconducting BSCCO thin films are numerous because of potential microelectronic applications. Among the popular methods of producing these films is by rf-magnetron sputtering. In sputtering, however, utilizing a Bi2Sr2CaCu2Ox, for instance, does not necessarily lead to a film of similar composition owing to the lack of understanding in the deposition mechanism when using multiple element oxide targets. This paper aims to investigate film characteristics deposited by rf-magnetron sputtering from various target compositions with the aim of determining the optimum target composition for the growth of superconducting 2212 thin films.

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Issue

Article ID

SPP-1994-CM-10

Section

Condensed Matter Physics, Superconductivity and Materials Physics

Published

1994-10-15

How to Cite

[1]
R Absin, N De Luna, J Corpuz, IJ Agulo, M Patricio, A Garcia, M Lagmay, A Villaflor, and RV Sarmago, RF-sputtered BSCCO films from various target compositions, Proceedings of the Samahang Pisika ng Pilipinas 12, SPP-1994-CM-10 (1994). URL: https://proceedings.spp-online.org/article/view/SPP-1994-CM-10.